Work

Modification of the Preston equation for the chemical–mechanical polishing of copper

Year: 1998

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(98)00896-7

Authors: Q. Luo, S. Ramarajan, S.V. Babu

Institution: Clarkson University

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968083733

FWCI: 10.43

Cites: 26

Cited by: 171

Related to: 10