Work

Effect of gas pressure on the sensitivity of a micromachined thermal accelerometer

Year: 2003

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/j.sna.2003.09.025

Authors: F. Mailly, A. Martinez, A. Giani, F. Pascal-Delannoy, A. Boyer

Institutions: Centre National de la Recherche Scientifique, Université de Montpellier, Université Montpellier 2

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1968130624

FWCI: 2.317

Cites: 17

Cited by: 41

Related to: 10