Work

Automatic control in microelectronics manufacturing: Practices, challenges, and possibilities

Year: 2000

Type: article

Source: Automatica

DOI: 10.1016/s0005-1098(00)00084-4

Authors: Thomas F. Edgar, Stephanie W. Butler, W.Jarrett Campbell, Carlos Pfeiffer, Christopher Bode, Sung Bo Hwang, K.S. Balakrishnan, J. Hahn

Institutions: The University of Texas at Austin, Texas Instruments (United States), Advanced Micro Devices (United States), Motorola (United States)

Language: English

Topic: Fault Detection and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W1968224762

FWCI: 15

Cites: 110

Cited by: 212

Related to: 10