Characterization of fluorinated hydrogenated amorphous silicon nitride (a-SiNx:H) alloys
Year: 1994
Type: article
Source: Journal of Applied Physics
DOI: 10.1063/1.357823
Institutions: Texas Tech University, University of Arkansas at Fayetteville
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1968536788