Work

Depth profiles of 3He ions implanted into solids at energies between 20 and 60 keV

Year: 1978

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.324693

Authors: J. Bo/ttiger, P. S. Jensen, U. Littmark

Institutions: Aarhus University, University of Copenhagen

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1970489554

FWCI: 3.492

Cites: 17

Cited by: 20

Related to: 10