Work

Trace metal analysis on hafnium silicate deposited Si wafer by Total Reflection X-ray Fluorescence

Year: 2008

Type: article

Source: Spectrochimica Acta Part B Atomic Spectroscopy

DOI: 10.1016/j.sab.2008.10.002

Authors: Hikari Takahara, Hiroyuki Murakami, Toru Kinashi, Chris Sparks

Language: English

Topic: X-ray Spectroscopy and Fluorescence Analysis

Subfield: Radiation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1972079848

FWCI: 0.647

Cites: 9

Cited by: 6

Related to: 10