Work

The influence of the filament temperature on the structure of hot-wire deposited silicon

Year: 2003

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(03)00136-6

Authors: C.H.M. van der Werf, P.A.T.T. van Veenendaal, M.K. van Veen, A.J. Hardeman, M.Y.S. Rusche, J.K. Rath, R.E.I. Schropp

Institution: Utrecht University

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1972467686

FWCI: 1.268

Cites: 10

Cited by: 35

Related to: 10