A high sensitivity and high linearity pressure sensor based on a peninsula-structured diaphragm for low-pressure ranges
Year: 2014
Type: article
Source: Sensors and Actuators A Physical
Authors: Xian Huang, Dacheng Zhang
Institution: Peking University
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1973459136