Work

Simulation and characterization of silicon-based 0.5-MHz ultrasonic nozzles

Year: 2004

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.527862

Authors: Y. L. Song, S. C. Tsai, W. J. Chen, Y. F. Chou, T. K. Tseng, C. S. Tsai

Institutions: California State University, Long Beach, National Taiwan University, University of California, Irvine

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science Council

OpenAlex ID: W1974891986

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