Work

Micromirrors for direct writing systems and scanners

Year: 1999

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.361264

Authors: Hubert K. Lakner, Wolfgang Doleschal, Peter Duerr, Andreas Gehner, Harald Schenk, Alexander Wolter, Guenter Zimmer

Institution: Fraunhofer Institute for Microelectronic Circuits and Systems

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Fraunhofer-Gesellschaft

OpenAlex ID: W1976308367

FWCI: 4.837

Cites:

Cited by: 6

Related to: 10