Work

Influence of oxygen concentration in sputtering gas on piezoelectric response of aluminum nitride thin films

Year: 2008

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.2957654

Authors: Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano, Akihiko Teshigahara, Nobuaki Kawahara

Institutions: National Institute of Advanced Industrial Science and Technology, Denso (Japan)

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1976705208

FWCI: 2.041

Cites: 25

Cited by: 85

Related to: 10