Work

Liquid RF MEMS variable inductor

Year: 2010

Type: conference-paper

Abstract: This paper reports on the design, fabrication and characterization of a new class of liquid RF variable inductor. These inductors have been designed for 2.5 GHz applications. SU8 laminated films have been used to realize the fluidic part of the inductance. Water and non toxic metal-liquid (Galinstan) are considered. The large contact area between the liquid and the spires lead to high variation ratio of the inductance with high quality factor. The proposed variable inductor is perspective key component for the multi-band RF circuits such as electrically controllable matching circuits and wide tuning range voltage controlled oscillator (VCO).

Source: Procedia Engineering

DOI: 10.1016/j.proeng.2010.09.372

Authors: I. El Gmati, P. Calmon, A. Boukabache, P. Pons, H. Boussetta, M.A. Kallala, K. Besbes

Institutions: Centre National de la Recherche Scientifique, Laboratoire d'Analyse et d'Architecture des Systèmes, Université Toulouse III - Paul Sabatier, Université de Toulouse, University of Monastir

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: diamond

OpenAlex ID: W1978001091

FWCI: 0.874

Cites: 15

Cited by: 10

Related to: 20