Work

Etching suspended superconducting tunnel junctions from a multilayer

Year: 2012
Type: article
Abstract: A method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor—insulator—normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated. We analyze semi-quantitatively the thermal behavior of a typical device.
Language: English
Open Access status: green
OpenAlex ID: W1978018579
FWCI: 1.355
Cites: 17
Cited by: 16
Related to: 10