Measurement of the Deformation of Silicon Substrates Coated with a Plasma-Polymerized Acrylonitrile Film
Year: 2010
Type: conference-paper
Source: Optical Interference Coatings
DOI: 10.1364/oic.2010.wb7
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978108237
