Work

Dose-dependent thermal oxidation of Ge+-implanted silicon

Year: 2007

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2007.04.240

Authors: Khalid Hossain, O.W. Holland, F.U. Naab, L.J. Mitchell, P.R. Poudel, J.L. Duggan, F.D. McDaniel

Institution: University of North Texas

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978213534

FWCI: 0.949

Cites: 14

Cited by: 9

Related to: 10