Work

High resolution elastic recoil detection

Year: 2004

Type: article

Source: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

DOI: 10.1016/j.nimb.2004.01.079

Authors: G. Dollinger, A. Bergmaier, L. Goergens, P. Neumaier, W. Vandervorst, S. Jakschik

Institutions: Technical University of Munich, IMEC, Infineon Technologies (Germany)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978223305

FWCI: 0.954

Cites: 44

Cited by: 31

Related to: 10