Work

A robust thermal microstructure for mass flow rate measurement in steady and unsteady flows

Year: 2013

Type: article

Source: Journal of Micromechanics and Microengineering

DOI: 10.1088/0960-1317/23/6/065016

Authors: R Viard, A Talbi, A Merlen, P Pernod, C Frankiewicz, J-C Gerbedoen, V Preobrazhensky

Institutions: Centre National de la Recherche Scientifique, Institut d'Electronique, de Microélectronique et de Nanotechnologie, Université Lille Nord de France, Russian Academy of Sciences

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978316236

FWCI: 1.302

Cites: 29

Cited by: 15

Related to: 10