Work

Atomic force microscopy of Au implanted in sapphire

Year: 1995

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.588235

Authors: D. O. Henderson, R. Mu, Y. S. Tung, M. A. George, A. Burger, S. H. Morgan, C. W. White, R. A. Zuhr, R. H. Magruder

Institutions: Fisk University, Oak Ridge National Laboratory, Vanderbilt University

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978328159

FWCI: 1.171

Cites:

Cited by: 22

Related to: 10