Work

On the influence of vacuum on the design and characterization of MEMS

Year: 2011

Type: article

Source: Vacuum

DOI: 10.1016/j.vacuum.2011.10.005

Authors: Marco Dienel, Michael Naumann, Alexander Sorger, Dirk Tenholte, Sebastian Voigt, Jan Mehner

Institution: Chemnitz University of Technology

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978456739

FWCI: 1.3

Cites: 45

Cited by: 25

Related to: 10