Physico-chemical characterization of thin films obtained by fluorination of GaAs under 5 bar of fluorine
Year: 1989
Type: article
Source: Thin Solid Films
Authors: A.S. Barrière, B. Desbat, H. Guégan, L. Lozano, T. Séguelong, A. Tressaud, P. Alnot
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978597501