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Interferometer for long gauge blocks up to 1000 mm and its measurement uncertainty

Year: 1998

Type: conference-paper

Source: Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

DOI: 10.1117/12.323093

Authors: Tatsuya Narumi, Yoshio Saruki, Taizo Nakamura, Shunji Shutoh, Masaji Sawabe

Institution: Mitutoyo Corporation (Japan)

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978733117

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