Work

Topographic and structural evolution of etched Si samples

Year: 2002

Type: article

Source: Computational Materials Science

DOI: 10.1016/s0927-0256(02)00176-3

Authors: Giuseppe Garozzo, Antonino La Magna, Salvo Coffa, Giuseppe D'Arrigo, Nicolò Parasole, Marco Renna, Corrado Spinella

Institutions: University of Catania, STMicroelectronics (Italy), Institute for Microelectronics and Microsystems

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1978951639

FWCI: 2.294

Cites: 6

Cited by: 4

Related to: 10