Microfabrication of AFM tips using focused ion and electron beam techniques
Year: 1992
Type: article
Source: Ultramicroscopy
Authors: Hongyu Ximen, Phillip E. Russell
Institution: North Carolina State University
Language: English
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1978953160