Work

Novel Thermally-Stable Hafnium and Zirconium ALD Precursors

Year: 2007

Type: conference-abstract

Source: ASMC proceedings

DOI: 10.1109/asmc.2007.375090

Authors: Audrey Pinchart, Nicolas Blasco, Christophe Lachaud, Anthony Schleisman, Christian Dussarrat, Ikuo Suzuki, K. Yanagita

Institutions: Air Liquide (France), Air Liquide Laboratories (Japan)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1980090597

Cites:

Cited by: 5

Related to: 10