Development of a turbo-molecular pump with a magnetic shield function
Year: 2012
Type: article
Source: Vacuum
Authors: Norio Ogiwara, Toru Yanagibashi, Yusuke Hikichi, Masaaki Nishikawa, Junichiro Kamiya, Kaoru Wada
Institutions: Japan Atomic Energy Agency, Osaka Vacuum, Ltd. (Japan)
Language: English
Subfield: Applied Mathematics
Field: Mathematics
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1980360201