Work

Control of optical properties of TiN_xO_y films and application for high performance solar selective absorbing coatings

Year: 2014

Type: article

Abstract: TiNxOy films with controllable optical properties have been fabricated by reactive mid-frequency magnetron sputtering from titanium nitride target. The optical and electrical properties were studied as a function of the reactive gas flow and were correlated with the film stoichiometry. The results showed that the behavior of TiNxOy films can be adjusted from metallic to dielectric by increasing oxygen content, which is of great significance to their extensive applications. Owing to the accurate control of optical properties, a TiNxOy based solar selective absorbing coating has been designed and prepared with the aid of TiO2/Si3N4/SiO2 antireflection layers. Its solar absorbance is as high as 97.5% and thermal emissivity is 4.3% with total thickness of 230 nm. The solar absorbance can maintain above 90% for a broad incident angle range from 0° to 65°.

Source: Optical Materials Express

DOI: 10.1364/ome.4.001833

Authors: Feiliang Chen, Shao-Wei Wang, Liming Yu, Xiaoshuang Chen, Wei Lu

Institutions: Chinese Academy of Sciences, Shanghai Institute of Technical Physics

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $1,843

Funder: National Natural Science Foundation of China