Work

A domain decomposition method for the simulation of fracture in polysilicon MEMS

Year: 2013

Type: article

Source: Microelectronics Reliability

DOI: 10.1016/j.microrel.2013.02.021

Authors: Federica Confalonieri, Giuseppe Cocchetti, Aldo Ghisi, Alberto Corigliano

Institution: Politecnico di Milano

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1980776653

FWCI: 0.2

Cites: 25

Cited by: 3

Related to: 10