Work

Electrically removable, micromachined encapsulation for sensitive materials

Year: 1997

Type: article

Source: Sensors and Actuators A Physical

DOI: 10.1016/s0924-4247(97)01482-9

Authors: M. Roth, S. Vogel, U. Schaber, H.-E. Endres

Institution: Fraunhofer-Gesellschaft

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: University of Oregon, Bayerische Forschungsstiftung, Technische Universität München

OpenAlex ID: W1981010410

FWCI:

Cites: 4

Cited by: 3

Related to: 10