Work

Improved measurement accuracy in optical scatterometry using fitting error interpolation based library search

Year: 2013

Type: article

Source: Measurement

DOI: 10.1016/j.measurement.2013.04.080

Authors: Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, Jinlong Zhu

Institutions: Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, State Key Laboratory of Digital Manufacturing Equipment and Technology

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Instrumentation

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

Awards: G3174957029, 基于红外椭偏光谱的高深宽比深沟槽结构侧壁形貌参数测量方法研究, G6372879777

OpenAlex ID: W1981933992

FWCI: 9.187

Cites: 34

Cited by: 29

Related to: 10