Work

Structural study of YSi1.7 layers formed by channeled ion beam synthesis

Year: 1998

Type: article

Source: Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

DOI: 10.1116/1.590105

Authors: M. F. Wu, Shude Yao, A. Vantomme, S. Hogg, H. Pattyn, G. Langouche, Qinqing Yang, Qiming Wang

Institutions: Peking University, KU Leuven, Chinese Academy of Sciences, Institute of Semiconductors

Language: English

Topic: Semiconductor materials and interfaces

Subfield: Atomic and Molecular Physics, and Optics

Field: Physics and Astronomy

Domain: Physical Sciences

Open Access status: closed

Funder: National Natural Science Foundation of China

OpenAlex ID: W1981982977

FWCI: 0.979

Cites: 21

Cited by: 8

Related to: 10