Work

Silicon nanocrystal memory devices obtained by ultra-low-energy ion-beam synthesis

Year: 2004

Type: article

Source: Solid-State Electronics

DOI: 10.1016/j.sse.2004.03.016

Authors: P Dimitrakis, E Kapetanakis, D Tsoukalas, D Skarlatos, C Bonafos, G Ben Asssayag, A Claverie, M Perego, M Fanciulli, V Soncini, R Sotgiu, A Agarwal, M Ameen, C Sohl, P Normand

Institutions: National Centre of Scientific Research "Demokritos", Centre National de la Recherche Scientifique, Centre d’Élaboration de Matériaux et d’Études Structurales, STMicroelectronics (Italy), Axcelis Technologies (United States)

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1982682012

FWCI: 7.914

Cites: 12

Cited by: 68

Related to: 10