Work

XPS and FTIR analysis of nitrogen incorporation in CNx thin films

Year: 1998

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/s0257-8972(97)00229-6

Authors: M. Tabbal, P. Mérel, S. Moisa, M. Chaker, E. Gat, A. Ricard, M. Moisan, S. Gujrathi

Institutions: Institut National de la Recherche Scientifique, Université Paris-Sud, Laboratoire de Physique des Gaz et des Plasmas, Université de Montréal

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Natural Sciences and Engineering Research Council of Canada

OpenAlex ID: W1982916175

FWCI: 8.395

Cites: 20

Cited by: 52

Related to: 10