Work

Surface and thickness profile measurement of a transparent film by three-wavelength vertical scanning interferometry

Year: 2014

Type: article

Source: Optics Letters

DOI: 10.1364/ol.39.004172

Author: Katsuichi Kitagawa

Institution: Toray Engineering Co., Ltd. (Japan)

Language: English

Topic: Optical measurement and interference techniques

Subfield: Computer Vision and Pattern Recognition

Field: Computer Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1982967934

FWCI: 2.31

Cites: 11

Cited by: 30

Related to: 10