Work

A method to determine the Young's modulus of thin-film elements assisted by dark-field electron holography

Year: 2013

Type: article

Source: Applied Physics Letters

DOI: 10.1063/1.4790617

Authors: S. Reboh, P. Benzo, P. Morin, R. Cours, M. J. Hÿtch, A. Claverie

Institutions: Centre National de la Recherche Scientifique, Centre d’Élaboration de Matériaux et d’Études Structurales, Université de Toulouse, STMicroelectronics (France)

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Agence Nationale de la Recherche

Awards: Métrologie 3D de déformation cristalline dans des nanostructures pour l’électronique, Microscopie Interférométrique et Microscopie Electronique en Transmission In Situ

OpenAlex ID: W1982979349

FWCI: 1.919

Cites: 31

Cited by: 7

Related to: 10