Work

Simulation of local mechanical stresses in lines on substrate

Year: 2003

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/s0167-9317(03)00394-0

Authors: Audrey Loubens, Roland Fortunier, René Fillit, Olivier Thomas

Institutions: Centre National de la Recherche Scientifique, Mines Saint-Étienne

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1983186642

FWCI: 1.322

Cites: 13

Cited by: 11

Related to: 10