Year: 2008
Type: article
Abstract: The elastic vibrations of semiconductor cantilevers, which were excited with a frequency-modulated laser, were studied theoretically and experimentally in this paper. The carrier density, temperature and elastic displacement distributions were obtained by using the theoretical model including plasma and thermoelastic effects. The results showed that the plasma wave had a significant influence on the vibrations. Using an interferometric setup the photothermal signals were investigated near the resonant frequency. The results showed that the experimental results were in good agreement with the theoretical ones.
Institutions: Centre National de la Recherche Scientifique, Franche-Comté Électronique Mécanique Thermique et Optique - Sciences et Technologies, École Nationale Supérieure de Mécanique et des Microtechniques, Xi'an Jiaotong University, Université de Franche-Comté, Institute for Multidisciplinary Research
Language: English
Subfield: Mechanics of Materials
Field: Engineering
Domain: Physical Sciences
Open Access status: bronze
Award: 广义微极热弹性耦合问题的研究
OpenAlex ID: W1983254992