Work

Investigation of the separation of 3D-structures with undercuts

Year: 2007

Type: article

Source: Microelectronic Engineering

DOI: 10.1016/j.mee.2007.01.138

Authors: S. Möllenbeck, N. Bogdanski, M. Wissen, H.-C. Scheer, J. Zajadacz, K. Zimmer

Institutions: University of Wuppertal, Leibniz Institute of Surface Engineering

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funder: Deutsche Forschungsgemeinschaft

OpenAlex ID: W1983370720

FWCI: 0.712

Cites: 7

Cited by: 13

Related to: 10