Work

X-ray scattering study of hydrogen implantation in silicon

Year: 2006

Type: article

Source: Journal of Applied Physics

DOI: 10.1063/1.2198928

Authors: Nicolas Sousbie, Luciana Capello, Joël Eymery, François Rieutord, Chrystelle Lagahe

Institutions: Soitec (France), Commissariat à l'Énergie Atomique et aux Énergies Alternatives, CEA Grenoble, Laboratoire d'Électronique des Technologies de l'Information

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1984032387

FWCI: 2.66

Cites: 17

Cited by: 84

Related to: 10