Propagation of the SiO2 breakdown event on MOS structures observed with conductive atomic force microscopy
Year: 2001
Type: article
Source: Microelectronic Engineering
Authors: M Porti, M Nafrı́a, X Aymerich, A Olbrich, B Ebersberger
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W1984415330