Work

Electron and heavy-particle kinetics in the low pressure oxygen positive column

Year: 1991

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/0022-3727/24/3/010

Authors: G Gousset, C M Ferreira, M Pinheiro, P A Sa, M Touzeau, M Vialle, J Loureiro

Institutions: Université Paris-Sud, Laboratoire de Physique des Gaz et des Plasmas

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985019053

FWCI: 6.721

Cites: 21

Cited by: 131

Related to: 10