Work

Calculation of parameters of krypton plasma excited by electron beam with additional heating by high-frequency electric field

Year: 2010

Type: article

Source: Optics and Spectroscopy

DOI: 10.1134/s0030400x10010029

Author: G. N. Zvereva

Institution: ITMO University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985107548

FWCI: 0.477

Cites: 20

Cited by: 6

Related to: 10