Work

Large-area low-damage plasma sources driven by multiple low-inductance-antenna modules for next-generation flat-panel display processes

Year: 2008

Type: article

Source: Surface and Coatings Technology

DOI: 10.1016/j.surfcoat.2008.06.001

Authors: Yuichi Setsuhara, Kosuke Takenaka, Akinori Ebe

Institutions: Joining and Welding Research Institute, The University of Osaka, EMD Corporation (Japan)

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Ministry of Education, Culture, Sports, Science and Technology

OpenAlex ID: W1985157609

FWCI:

Cites: 21

Cited by: 7

Related to: 10