Work

Thermal stability of copper nitride films prepared by rf magnetron sputtering

Year: 1998

Type: article

Source: Thin Solid Films

DOI: 10.1016/s0040-6090(98)00448-9

Authors: Z.Q Liu, W.J Wang, T.M Wang, S Chao, S.K Zheng

Institution: Lanzhou University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985286586

FWCI: 3.492

Cites: 6

Cited by: 126

Related to: 10