Work

Transport During Hot Embossing Micro-Manufacturing Studied via Stylus Profilometry and SEM

Year: 2003

Type: conference-paper

Source: ASME International Mechanical Engineering Congress and Exposition (IMECE)

DOI: 10.1115/imece2003-41838

Authors: Harry D. Rowland, Joseph L. Charest, Tanya L. Wright, William P. King

Institution: Georgia Institute of Technology

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985358953

FWCI:

Cites:

Cited by: 1

Related to: 10