Work

HfxZr1−xO2 compositional control using co-injection atomic layer deposition

Year: 2012

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/1.4764473

Authors: Steven Consiglio, Kandabara Tapily, Robert D. Clark, Genji Nakamura, Cory S. Wajda, Gert J. Leusink

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1985608913

FWCI: 0.6

Cites: 22

Cited by: 11

Related to: 10