Work

Experimental measurements of spatial plasma potentials and electron energy distributions in inductively coupled plasma under weakly collisional and nonlocal electron kinetic regimes

Year: 2012

Type: article

Source: Physics of Plasmas

DOI: 10.1063/1.3692768

Authors: Hyo-Chang Lee, Chin-Wook Chung

Institution: Hanyang University

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986149124

FWCI: 3.201

Cites: 12

Cited by: 40

Related to: 10