Work

Hybrid LCVD of micro-metallic lines for TFT-LCD circuit repair

Year: 2006

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2006.06.054

Authors: J.B. Park, C.J. Kim, P.E. Shin, S.H. Park, H.S. Kang, S.H. Jeong

Institutions: Gwangju Institute of Science and Technology, LG (South Korea)

Language: English

Topic: Laser Material Processing Techniques

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986210010

FWCI: 2.557

Cites: 21

Cited by: 17

Related to: 8