Work

In situ substrate preparation for high-quality SiC chemical vapour deposition

Year: 1997

Type: article

Source: Journal of Crystal Growth

DOI: 10.1016/s0022-0248(97)00247-9

Authors: C. Hallin, F. Owman, P. Mårtensson, A. Ellison, A. Konstantinov, O. Kordina, E. Janzén

Institutions: Linköping University, ABB (Sweden)

Language: English

Topic: Silicon Carbide Semiconductor Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986320163

FWCI: 5.289

Cites: 22

Cited by: 124

Related to: 10