Work

Chemical Analysis of Surfaces by Total-Reflection-Angle X-Ray Spectroscopy in RHEED Experiments (RHEED-TRAXS)

Year: 1985

Type: article

Abstract: A new method for chemical analysis of surfaces by total-reflection-angle X-ray spectroscopy in RHEED experiments (RHEED-TRAXS) has been developed. When the X-ray take-off angle is set to be the critical angle for total reflection of the characteristic X-ray emitted from the deposited atoms on surfaces, the detection efficiency for the deposit becomes drastically higher owing to the refraction effect of the X-ray. This enhancement of surface sensitivity is demonstrated with Ag on Si(111). The smallest detectable amount of Ag is about 0.01 monolayer or less. This sensitivity is comparable to or higher than that of AES.

Source: Japanese Journal of Applied Physics

DOI: 10.1143/jjap.24.l387

Authors: Shuji Hasegawa, Shozo Ino, Youiti Yamamoto, Hiroshi Daimon

Institution: The University of Tokyo

Language: English

Topic: Electron and X-Ray Spectroscopy Techniques

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: bronze

OpenAlex ID: W1986338192

FWCI: 2.678

Cites: 8

Cited by: 126

Related to: 10