Work

Plasma parameters measurements by means of Langmuir probe

Year: 2008

Type: article

Source: Radiation effects and defects in solids

DOI: 10.1080/10420150701780557

Authors: D. Mascali, N. Gambino, R. Miracoli, S. Gammino, L. Torrisi, F. Maimone, L. Tumino

Institutions: University of Catania, Istituto Nazionale di Fisica Nucleare, Sezione di Catania, Istituto Nazionale di Fisica Nucleare, Laboratori Nazionali del Sud, University of Messina

Language: English

Topic: Low-Pressure Plasma Processing and Diagnostics

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W1986805352

FWCI: 1.368

Cites: 12

Cited by: 18

Related to: 10